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Keith A. Gillis
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Slowflows: Progress Towards a Novel Flow Standard for Semiconductor Process Gases
Number of pages: 27
Posted: 30 Aug 2024
Jodie Gail Pope
, Keith A. Gillis,
Aaron N. Johnson
and
Joey T. Boyd
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,
affiliation not provided to SSRN
,
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Abstract:
Gas flow standard, semiconductor process gas, rate-of-rise
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