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Yusuke Nakano

Kanazawa University

Kanazawa

Japan

  • Kanazawa University

SCHOLARLY PAPERS

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Scholarly Papers (1)

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Low-Temperature Deposition of Additive-Aided Yttrium Oxide Films Via Atmospheric Pressure Plasma Jet

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Low-Temperature Deposition of Additive-Aided Yttrium Oxide Films Via Atmospheric Pressure Plasma Jet

Number of pages: 23 Posted: 14 Nov 2024
Bat-Orgil Erdenezaya, Md. Shahiduzzaman, Hirochika Uratani, Ruka Yazawa, Yusuke Nakano, Yasunori Tanaka, Tetsuya Taima and Tatsuo Ishijima
Kanazawa University, Kanazawa University, Kanazawa University, Kanazawa University, Kanazawa University, Kanazawa University, Kanazawa University and Kanazawa University
Downloads 37 (1,252,562)

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yttrium oxide film, atmospheric pressure plasma, metal-organic precursor, plasma-enhanced chemical vapor deposition

Low-Temperature Deposition of Additive-Aided Yttrium Oxide Films Via Atmospheric Pressure Plasma Jet

Number of pages: 24 Posted: 01 Oct 2024
Bat-Orgil Erdenezaya, Md. Shahiduzzaman, Hirochika Uratani, Ruka Yazawa, Yusuke Nakano, Yasunori Tanaka, Tetsuya Taima and Tatsuo Ishijima
Kanazawa University, Kanazawa University, Kanazawa University, Kanazawa University, Kanazawa University, Kanazawa University, Kanazawa University and Kanazawa University
Downloads 24 (1,445,011)

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yttrium oxide film, atmospheric pressure plasma, metal--organic precursor, plasma-enhanced chemical vapor deposition