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Gowun Jung

Korea Research Institute of Chemical Technology (KRICT)

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Recombination Mechanism in the Thermal Degradation of Cyclopentadienyl Tris(Dimethylamino) Zirconium

Number of pages: 40 Posted: 24 Oct 2024
Hee-Seon Lee, Gowun Jung, Hwanhui Yun, In Young Song, Jinhee Lee, Wang-Eun Lee, Ju-Young Yun, Jun-Hee Na and Kyuyoung Heo
Korea Research Institute of Chemical Technology (KRICT), Korea Research Institute of Chemical Technology (KRICT), Korea Research Institute of Chemical Technology (KRICT), Korea Research Institute of Chemical Technology (KRICT), Korea Research Institute of Chemical Technology (KRICT), Korea Research Institute of Chemical Technology (KRICT), Korea Research Institute of Standards and Science (KRISS), Chungnam National University and Korea Research Institute of Chemical Technology (KRICT)
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Thermal degradation, CpZr(NMe2)3, Organometallic precursor, Radical recombination, Atomic layer deposition