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Xuezhong Wu

National University of Defense Technology

Changsha Hunan, 410073

China

  • National University of Defense Technology

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Scholarly Papers (1)

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Mems Friction Vacuum Gauge Embedded in Small Vacuum Chambers for Vacuum and Gas Load Measurement

Number of pages: 13 Posted: 19 Oct 2024
chengxiang wang, Qingsong Li, Yulie Wu, Zhanqiang Hou, Xuezhong Wu and Dingbang Xiao
National University of Defense Technology, National University of Defense Technology, National University of Defense Technology, National University of Defense Technology, National University of Defense Technology and National University of Defense Technology
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Abstract:

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MEMS friction vacuum gauge, embedded measurement, metal tube package, leakage measurement