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Xiangfei Zheng
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Scholarly Papers (1)
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1.
Synthesis of Copolymer Containing Anthracene Group and its Application in Bottom Anti-Reflective Coatings for Krf Photoresist
Number of pages: 24
Posted: 31 Oct 2024
Yajun Xu
,
Jialong Zhang
, Xiangfei Zheng,
Liang Xu
and
Jingcheng Liu
Jiangnan University, China Petroleum & Chemical Corporation - Shanghai Research Institute of Petrochemical Technology,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
and Jiangnan University
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Abstract:
Anti-reflective coating, KrF photoresist, Copolymer, Anthracene
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