Tao Liu

Chongqing University

Shazheng Str 174, Shapingba District

Shazheng street, Shapingba district

Chongqing 400044, 400030

China

  • Chongqing University

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Scholarly Papers (1)

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A High Sensitivity Capacitive Micromachined Ultrasonic Transducer (Cmut) with Stepped Cavity Structure

Number of pages: 22 Posted: 11 Nov 2024
Haoliang Jia, Wangyang Zhang, Tao Liu, Lei Ren, Shaohui Qin, Jiawei Yuan, Libo Zhao, Zhikang Li and Xiao Jing Mu
Chongqing University, Chongqing University, Chongqing University, Chongqing University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Chongqing University - International R & D center of Micro-nano Systems and New Materials Technology
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Abstract:

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CMUT, Stepped cavity, Electromechanical coupling coefficient, Ultrasonic sensitivity