Laser induced periodic surface structures, Silicon, Controlled atmosphere, Chemical composition
Sputtered alloy thin films, antibacterial activity of metallic thin films, bacteria degradation by release killing, metallic glass thin film, polycrystalline thin films
Soda-lime glass, CO2 Laser, Thermal expansion, Damage zone, micro-cracks
Laser-induced periodic surface structures (LIPSS), Silver thin films, Antibacterial activity, physical vapor deposition