Qiuqin Wang

Bengbu University

Bengbu

China

  • Bengbu University

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Scholarly Papers (1)

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Efficient Synthesis of Monodisperse SiO2 Spheres and Their Application Performance in Chemical Mechanical Polishing

Number of pages: 22 Posted: 18 Dec 2024
Jinlong Ge, Yu Cao, Hui Han, Xiaoqi Jin, Jing Liu, Yuhong Jiao, Qiuqin Wang and Yan Gao
Bengbu University, Bengbu Zhongheng New Material Technology Co., Ltd., Anhui Kaisheng applied Materials Co., Ltd., Bengbu University, Bengbu Zhongheng New Material Technology Co., Ltd., Bengbu University, Bengbu University and Bengbu University
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Abstract:

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Stöber method, SiO2 sphere, chemical mechanical polishing, planarization, SiO2 slurry