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Minghao Liu

Xiamen University

Xiamen, 361005

China

  • Xiamen University

SCHOLARLY PAPERS

2

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86

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Scholarly Papers (2)

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1.

Surface-Acoustic-Wave Resonators Based on Aln Thin Films on Si, 4h-Sic, and Sapphire Substrates

Number of pages: 27 Posted: 17 Dec 2024
Hongliang Zu, Zhiwei Li, Minghao Liu, Tiejun Li and Haisheng San
Xiamen University, Xiamen University, Xiamen University, affiliation not provided to SSRN and Xiamen University
Downloads 61 (961,006)

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AlN on various substrates, SAW resonator, crystal quality, resonant frequency, return loss, quality factor

2.

Optimal Preparation of Aln Thin Films on Sapphire Substrate and its Application in Saw Resonators

Number of pages: 25 Posted: 10 Dec 2024
Hongliang Zu, Minghao Liu, Zhiwei Li, Tiejun Li and Haisheng San
Xiamen University, Xiamen University, Xiamen University, affiliation not provided to SSRN and Xiamen University
Downloads 25 (1,399,036)

Abstract:

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AlN, crystal quality, surface morphology, SAW resonator, resonant frequency, return loss