Stevinweg 1
Delft, 2628 CN
Netherlands
Delft University of Technology
Active Damping Control, Delay, Non-Minimum-Phase, Nanopositioning stage, Loop Shaping, High-Pass Filter, Higher-Order Mode, Resonant Control, Position Feedback, Piezoelectric
Active Damping Control, Band-Pass Controller, Loop-Shaping Design, Resonance Suppression, Noise Attenuation, Spillover Reduction, Flexible Structures, Nanopositioning
Robust Control, Mixed-Sensitivity H∞ Control, Active Damping, NRC, Weighting Function Design, Payload Uncertainties, Piezoelectric Nanopositioning
Nanopositioning, Piezo-Actuated, Active Damping Control, Non-Minimum-Phase, Resonant Control, Dual Closed-Loop
Active Damping Control, High-Pass Filter, Higher-Order, PPF, PID, Positioning Stage, Non-collocated, Robustness
