Biao Yan

Shandong University

27 Shanda Nanlu

South Rd.

Jinan, SD 250100

China

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Fabrication of Diamond Drum Resonators Via Laser Engraving and Si Wet Etching for High Precision Temperature Sensing

Number of pages: 22 Posted: 25 Dec 2024

Yunchao Du, Zhixin Zhao, Haoran Li, Biao Yan and Duo Liu

Shandong University, Shandong University, Shandong University, Shandong University and Shandong University

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