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Xinyu Wang

affiliation not provided to SSRN

  • affiliation not provided to SSRN

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Electrothermal Tuning to Reduce Frequency Splitting in Mems Ring Resonators

Number of pages: 22 Posted: 26 Dec 2024
Kai Wu, Xinyu Wang, Kuo Lu, Qingsong Li, Maobo Wang, chengxiang wang, Yan Shi, Xuezhong Wu and Dingbang Xiao
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, National University of Defense Technology, affiliation not provided to SSRN, National University of Defense Technology, affiliation not provided to SSRN, National University of Defense Technology and National University of Defense Technology
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Abstract:

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MEMS resonator, Frequency splitting, electrothermal tuning, degenerate modes, Joule heating, MEMS gyroscope