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Dianxiang Yao

affiliation not provided to SSRN

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Fabrication and Characterization of Tio2 and Sio2 as Protective Coating for Mo/Si Multilayer by Ion Beam Sputtering

Number of pages: 14 Posted: 01 Jan 2025
Dianxiang Yao, Zhe Zhang, Xinyi Liu, Qiushi Huang, Xiangyue Liu, Siyi Huang, Runze Qi, Zhong Zhang, Shuhu Liu, Lei Zheng, Weiwei Deng and Zhanshan Wang
affiliation not provided to SSRN, Tongji University, affiliation not provided to SSRN, Tongji University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Tongji University, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and Tongji University
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Protective coating, Mo/Si multilayer, ion beam sputtering, X-ray photoelectron spectroscopy