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Zhenjue Shen
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
The Impact of Silicon Surface Pretreatment on Interface Structure and Passivation Quality of Alox Films Deposited by Atomic Layer Deposition
Number of pages: 34
Posted: 08 Jan 2025
Jiahui Xu
,
Wenjing Zhang
,
Yuxuan Li
,
Cui Liu
,
Geng Zhang
, Zhenjue Shen,
Pierre Verlinden
and
Xiao Yuan
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Abstract:
ALD AlOx, pretreatment, surface passivation, interface structure
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