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Yichi Zhang

North University of China

No. 3 Xueyuan Road, Taiyuan, China

taiyuan, 030051

China

  • North University of China

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Analysis of Ge/Ti/Al, Ni/Ti/Al Triple Layer Contacts to P-Type 4h-Sic

Number of pages: 12 Posted: 24 Jan 2025
Kunlun Lv, Jiachen Zhang, Yuan Yin, Jiacheng Li, Quansheng Li, Huanfei Wen, Jun Tang and Yichi Zhang
North University of China, North University of China, North University of China, North University of China, North University of China, North University of China, North University of China and North University of China
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Abstract:

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4H-SiC, Ohmic contact, Ge/Ti/Al, Ni/Ti/Al, Contact resistivity, Annealing