Hao Chen

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Experimental Study of Influence Factors on Thermal Contact Resistance between Silicon Wafer and Alumina Ceramic Materials for Semiconductor Manufacturing Application

Number of pages: 21 Posted: 17 Feb 2025

Mengjun Chen, Shichuan Hu, Hao Chen and Ping Zhang

Guilin University of Electronic Technology, Guilin University of Electronic Technology, affiliation not provided to SSRN and Guilin University of Electronic Technology

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