143-743 Seoul
Korea, Republic of (South Korea)
Sejong University
Hf1-xZrxO2, Ferroelectric, ZrO2-seed layer, Back-end-of-line, Kinetic energy barrier
Hf1-xZrxO2, Ferroelectric, ZrO2-seed layer, Back-end-of-line, Kinetic energy barrier, Atomic layer deposition