Zhao Junqing

Harbin Institute of Technology

92 West Dazhi Street

Nan Gang District

Harbin, 150001

China

  • Harbin Institute of Technology

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Dft Mechanistic Insights into Atomic Layer Deposition of Β-Ga2o3

Number of pages: 14 Posted: 25 Mar 2025
Jiamin Yang, Yuhang Jing, Zhiqiang Yang, Zhao Junqing, Weiqi Li, Yan Jihong, Jianqun Yang and Xingji Li
Harbin Institute of Technology, Harbin Institute of Technology, Harbin Institute of Technology, Harbin Institute of Technology, Harbin Institute of Technology, Harbin Institute of Technology, Harbin Institute of Technology and Harbin Institute of Technology
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Abstract:

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Density Functional Theory, β-Ga2O3, Trimethylgallium, Atomic Layer Deposition, Reaction Mechanism