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Kazuhiro Yoshida

affiliation not provided to SSRN

SCHOLARLY PAPERS

1

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0

Scholarly Papers (1)

1.

Next-Generation Ehd Micropumps with Space-Efficient Mems-Fabricated Needle and Ring Electrode Arrays

Number of pages: 14 Posted: 10 May 2025
Yichuan Zhu, Michael De Volder, Kazuhiro Yoshida and Joon-wan Kim
Institute of Science Tokyo, University of Cambridge, affiliation not provided to SSRN and affiliation not provided to SSRN
Downloads 39 (1,196,171)

Abstract:

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MEMS, Microactuator, Micropump, Electrohydrodynamics (EHD), SU-8 Pyrolysis, fiber laser drilling