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Xi Chen

National University of Defense Technology

Changsha Hunan, 410073

China

  • National University of Defense Technology

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Scholarly Papers (1)

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Squeeze Film Damping of a Differential Torsional Mems Resonator in the Free Molecular Flow Regime

Number of pages: 11 Posted: 20 May 2025
Xi Chen, Zhanqiang Hou, Gao Liu, Zhenghao Yin, Xuezhong Wu and Dingbang Xiao
National University of Defense Technology, National University of Defense Technology, National University of Defense Technology, National University of Defense Technology, National University of Defense Technology and National University of Defense Technology
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Abstract:

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MEMS resonator, free molecular flow regime, squeeze film damping, Thermal Accommodation Coefficient