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Yuxing Qi

affiliation not provided to SSRN

  • affiliation not provided to SSRN

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Reactive Hipims-Deposited Crnx Coatings: Plasma Diagnostics and Nitrogen Deficiency

Number of pages: 23 Posted: 28 May 2025
Kaiwei Yang, Yiqun Feng, Yuxing Qi, Guanshui Ma, Zhenyu Wang and Aiying Wang
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Chinese Academy of Sciences (CAS) - Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences (CAS) - Ningbo Institute of Materials Technology and Engineering and Chinese Academy of Sciences (CAS) - Ningbo Institute of Materials Technology and Engineering
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Abstract:

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HiPIMS, reactive sputtering, nitrogen deficiency, CrNx coating, Plasma diagnostics, electron density