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Leonid Mochalov
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Gas-Sensitive Properties of Pecvd Nanocrystalline Ga2o3 Thin Films Doped with Zn
Number of pages: 22
Posted: 13 Jun 2025
Aleksei V. Almaev
, Leonid Mochalov,
Dmitry Almaev
,
Ekaterina Slapovskaya
,
Sergey V. Telegin
,
Bogdan Kushnarev
and
Pavel Yunin
National Research Tomsk State University,
affiliation not provided to SSRN
, National Research Tomsk State University,
affiliation not provided to SSRN
,
affiliation not provided to SSRN
, National Research Tomsk State University and
affiliation not provided to SSRN
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Abstract:
nanocrystalline Ga2O3, PECVD, Thin Films, gas sensitivity
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