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Zhengyang Qiao

affiliation not provided to SSRN

SCHOLARLY PAPERS

1

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Scholarly Papers (1)

1.

Microstructure Evolution and Long-Term Oxidation Resistant Performance of Al2o3/Si3n4/Yalo Composite Film

Number of pages: 22 Posted: 20 Jun 2025
affiliation not provided to SSRN, University of Electronic Science and Technology of China (UESTC), affiliation not provided to SSRN, University of Electronic Science and Technology of China (UESTC) - State Key Laboratory of Electronic Thin Films and Integrated Devices, affiliation not provided to SSRN and University of Electronic Science and Technology of China (UESTC)
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Abstract:

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Al2O3/Si3N4/YAlO protective layer, Isothermal oxidation, Thin film sensor, Oxidation resistance, Y-Si-Al-O-N glass