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Francois Boedt
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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(Rank)
1.
300 Mm Ssoi Engineering with Ultra Thin Box
Number of pages: 3
Posted: 23 Jun 2025
David Barge
,
Manon Gallard
,
Jean-Michel Hartmann
,
Frank Fournel
,
Virginie Loup
,
Frederic Mazen
,
Emmanuel Nolot
,
Pauline Hauchecorne
,
Julian Sturm
,
Van-hoan Le
,
Isabelle Huyet
,
Daniel Delprat
, Francois Boedt and
Florence Servant
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,
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,
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,
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,
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,
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, University Grenoble Alpes - CEA, Leti,
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Abstract:
FD-SOI, SSOI, Si1-xGex
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