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Wa Tang

Chinese Academy of Sciences (CAS)

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A Closed-Loop Framework for Subnanometer Fabrication of Computer-Generated Holograms for Optical Surface Measurement

Number of pages: 15 Posted: 03 Jul 2025
Hongda Wei, Zhiyu Zhang, Xiangji Bian, Jianwen Zhang, Kai Xu, Wa Tang, Weijie Deng, Haixiang Hu and Xuejun Zhang
Chinese Academy of Sciences (CAS), Chinese Academy of Sciences (CAS), Chinese Academy of Sciences (CAS), Chinese Academy of Sciences (CAS), Chinese Academy of Sciences (CAS), Chinese Academy of Sciences (CAS), Chinese Academy of Sciences (CAS), Chinese Academy of Sciences (CAS) and Chinese Academy of Sciences (CAS)
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Abstract:

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Reactive Ion Etching, Ion Beam Figuring, Computer-Generated Holograms, Optical Design and Fabrication, Micro/Nanostructures