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Kunpeng Zhang
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Optimizing Repetition Rate and Fluence for Improved Groove Depth in Femtosecond Laser Processing of Silicon
Number of pages: 18
Posted: 09 Jul 2025
Siwei Zhang
,
Zhe Zhang
,
Yuhang Li
,
Shunshuo Cai
, Kunpeng Zhang,
Haiyan Shi
,
Misheng Liang
,
Rui You
,
Yiling Lian
,
Yu Hou
and
Zichen Zhang
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,
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,
affiliation not provided to SSRN
,
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,
affiliation not provided to SSRN
,
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, Beijing Information Science and Technology University, Beijing Information Science and Technology University, The University of Hong Kong,
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and
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(1,332,057)
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Abstract:
silicon groove, femtosecond laser, plasma, phase transition
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