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Zhenkai Sun

Shandong University

27 Shanda Nanlu

South Rd.

Jinan, SD 250100

China

SCHOLARLY PAPERS

1

DOWNLOADS

23

TOTAL CITATIONS

0

Scholarly Papers (1)

1.

Study on the Detection of Element Content of Silicon Carbide Wafers on Different Processed Surfaces by Glow Discharge Mass Spectrometry

Number of pages: 12 Posted: 02 Aug 2025
Shandong University, Shandong University, Shandong University, Shandong University and Shandong University
Downloads 23 (1,411,822)

Abstract:

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GDMS, SiC wafer, RSF, surface impurity