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Eun Mi Kim

Korea Institute of Industrial Technology (KITECH)

89, Yangdaegiro-gil, Ipjang-myeon

Seobuk-gu, Cheonan-si Chungcheongnam-do

Cheonan, 31056

  • Korea Institute of Industrial Technology (KITECH)

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Interfacial Oxidation-Enabled Sio2 Films with Enhanced Moisture Barrier Without Increasing Thickness

Number of pages: 28 Posted: 23 Aug 2025
Su-Jin Kim, Eun Mi Kim, Younghoon Kim, D. B. Malavekar, Jin Hyeok Kim and Jongho Lee
affiliation not provided to SSRN, Korea Institute of Industrial Technology (KITECH), affiliation not provided to SSRN, Chonnam National University, Chonnam National University - Optoelectronic Convergence Research Center and affiliation not provided to SSRN
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Abstract:

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SiO₂ thin films, oxidation reaction layer (ORL), Moisture barrier, PECVD, Structural integrity