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Aivar Tarre

University of Tartu

SCHOLARLY PAPERS

2

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41

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0

Scholarly Papers (2)

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1.

Crystal structure and mechanical properties of atomic layer deposited and thermally treated silicon oxide doped hafnium oxide films

Number of pages: 18 Posted: 03 Dec 2025
Oliver Vanker, Aivar Tarre, Aarne Kasikov, Peeter Ritslaid and Taivo Jõgiaas
University of Tartu, University of Tartu, University of Tartu, University of Tartu and University of Tartu - Institute of Physics
Downloads 22 (1,436,435)

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atomic layer deposition, Nanoindentation, heat treatment

2.

Optical Properties of Oxide Thin Films at a Transition Stage of Ald

Number of pages: 44 Posted: 26 Aug 2025
Aarne Kasikov, Aivar Tarre, Taivo Jõgiaas, Mahtab Salari Mehr and Lauri Aarik
affiliation not provided to SSRN, University of Tartu, University of Tartu - Institute of Physics, affiliation not provided to SSRN and University of Tartu
Downloads 19 (1,470,786)

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Spectroscopic ellipsometry, refractive index, inhomogeneity, Atomic layer deposition, ligands, growth delay