Minjin Lee

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Etching Resistance and Particle Suppression Behavior of Y2O3–ZrO2 Composite Coatings in Fluorine-Based Plasma

Number of pages: 32 Posted: 28 Aug 2025

Gyutae Park, Hyunho Yang, Minjin Lee, Ki-In Choi and Hyunseong Kum

Yonsei University, Yonsei University, affiliation not provided to SSRN, affiliation not provided to SSRN and Yonsei University

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