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Changsong Liu

Qingdao University of Technology

Qingdao, 266033

China

  • Qingdao University of Technology

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Achieving low friction and high corrosion resistance DLC-Si films by HiPIMS

Number of pages: 24 Posted: 08 Sep 2025
Zhiyong Zhang, Yongqiang Fu, Changsong Liu, Feng Guo, Dongzhou Jia, Jiarong Wang, Lei Cao, Xiaoqiang Wu and Xiaoxue Li
Qingdao University of Technology, Qingdao University of Technology, Qingdao University of Technology, Qingdao University of Technology, Liaoning University of Technology, affiliation not provided to SSRN, Qingdao University of Technology, Ordos Institute of Technology and Ordos Institute of Technology
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DLC-Si films, Wear resistance, Corrosion resistance