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Yusi Wang

Zhejiang University

38 Zheda Road

Hangzhou, 310058

China

  • Zhejiang University

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Scratch-Resistant Color Filters for Near-Infrared Laser Applications

Number of pages: 16 Posted: 29 Sep 2025
Haidong He, Haiqi Gao, LinZe Li, Yu Shao, Yusi Wang, Can Liu, Jianzhong Jiang, Yuchuan Shao, Yueguang Zhang, Weidong Shen and Chenying Yang
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, Zhejiang University, affiliation not provided to SSRN, affiliation not provided to SSRN, Shanghai University - School of Microelectronics, Zhejiang University, Zhejiang University and affiliation not provided to SSRN
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Abstract:

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colored filter, high near-infrared transmittance, Si₃N₄/Si multilayer filter, high-hardness, scratch-resistant