Lijie Wu

Guangdong University of Technology

No. 100 Waihuan Xi Road

Guangzhou Higher Education Mega Center

Guangzhou, 510006

China

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Material Properties and Grinding Mechanism of SiC Laser Slicing Wafers

Number of pages: 25 Posted: 30 Sep 2025

Jingyuan Zheng, Qiusheng Yan, Lijie Wu, Lijie Wu and Shupei Wang

Guangdong University of Technology, Guangdong University of Technology, Guangdong University of Technology, Guangdong University of Technology and Guangdong University of Technology

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