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C.C. Cheng

National Chung Cheng University

Min-Shiung, Chia-Yi, 621

Taiwan

  • National Chung Cheng University

SCHOLARLY PAPERS

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Scholarly Papers (1)

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Stress-dependent chemical function from guanidine carbonate on chemical mechanical polishing of monocrystalline silicon wafers

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Stress-dependent chemical function from guanidine carbonate on chemical mechanical polishing of monocrystalline silicon wafers

Number of pages: 21 Posted: 13 Nov 2025
Da Bian, Pengcheng Xu, Jhih-Hao Liang, Yongguang Wang, Yi Chen, Yeau-Ren Jeng and C.C. Cheng
Jiangnan University, Jiangnan University, National Cheng Kung University - Mechanical Engineering Department, Soochow University, Jiangnan University, National Cheng Kung University - Department of Biomedical Engineering and National Chung Cheng University
Downloads 34 (1,296,409)

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Deformation behaviour, CMP, Nanoscracth, Electrochemistry

Stress-dependent chemical function from guanidine carbonate on chemical mechanical polishing of monocrystalline silicon wafers

Number of pages: 22 Posted: 11 Oct 2025
Da Bian, Pengcheng Xu, Jhih-Hao Liang, Yongguang Wang, Yi Chen, Yeau-Ren Jeng and C.C. Cheng
Jiangnan University, Jiangnan University, National Cheng Kung University - Mechanical Engineering Department, Soochow University, Jiangnan University, National Cheng Kung University - Department of Biomedical Engineering and National Chung Cheng University
Downloads 33 (1,311,254)

Abstract:

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Deformation behaviour, CMP, Nanoscracth, Electrochemistry