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Yumeng Guo

Sungkyunkwan University

Seobu-ro, Jangan-gu,

Sungkyunkwan University, Seobu-ro, Jangan-gu

Suwon, 2066

Korea, Republic of (South Korea)

  • Sungkyunkwan University

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Al-doped HfO2 Ferroelectric Memories Featuring Pulse-Width Dependent Programming Speed and BEOL Compatibility

Number of pages: 33 Posted: 10 Dec 2025
Junsin Yi, Yumeng Guo, Junzhe Zhang, Yong-Sang Kim, Jang-Kun Song and Muhammad Quddamah Khokhar
Sungkyunkwan University, Sungkyunkwan University, Sungkyunkwan University, Sungkyunkwan University, Sungkyunkwan University and Sungkyunkwan University
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Abstract:

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Al-doped HfO2, Ferroelectric thin films, Non-volatile memory, Low-temperature processing, Endurance reliability