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Yevgeniya Larionova

affiliation not provided to SSRN

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A novel separate-precursor-pulse PECVD SiOx as interfacial oxide for polysilicon passivating contacts applied to industrial high efficiency silicon solar cells

Number of pages: 13 Posted: 18 Dec 2025
Yevgeniya Larionova, Viet Xuan Nguyen, Thomas Pernau, Daniela Seiffert, Rolf Brendel and Thorsten Dullweber
affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN, affiliation not provided to SSRN and affiliation not provided to SSRN
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passivating contact, PECVD, interfacial oxide, TOPCon solar cells, poly-Si junction, IBC