An-Chen Liu

National Yang Ming Chiao Tung University

No. 1001, Daxue Road

East District

Hsinchu City, 300093

Taiwan

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Low-Temperature Supercritical Nitrogen Passivation for surface Trap Suppression and Improved Performance of Recessed-Gate AlGaN/GaN MIS-HEMTs

Number of pages: 4 Posted: 22 Dec 2025

An-Chen Liu, Tsung-Sheng Kao and Hao-Chung Kuo

National Yang Ming Chiao Tung University, National Yang Ming Chiao Tung University and National Chiao Tung University

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