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Yong Jia

Chinese Academy of Sciences (CAS) - Dalian Institute of Chemical Physics

52 Sanlihe Rd.

Datun Road, Anwai

Beijing, 100864

China

  • Chinese Academy of Sciences (CAS) - Dalian Institute of Chemical Physics

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Scholarly Papers (1)

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Fused Silica with Atomic-level Super-smooth Surface Manufactured by Dual-size Synergistic Nano CeO2 and  its Highly Efficient Polishing Mechanism

Number of pages: 21 Posted: 24 Dec 2025
Zehua Wu, Gang Li, Yong Jia, Zhixin Zhang, Feng Wang and Yuqi Jin
Chinese Academy of Sciences (CAS) - Dalian Institute of Chemical Physics, Chinese Academy of Sciences (CAS) - Dalian Institute of Chemical Physics, Chinese Academy of Sciences (CAS) - Dalian Institute of Chemical Physics, Chinese Academy of Sciences (CAS) - Dalian Institute of Chemical Physics, Chinese Academy of Sciences (CAS) and Chinese Academy of Sciences (CAS) - Dalian Institute of Chemical Physics
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Abstract:

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Chemical mechanical polishing, Ce single atom, surface roughness, mid-spatial frequency error, polishing mechanism