Changui Ahn

affiliation not provided to SSRN

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Plasma-enhanced atomic layer deposition of MgO thin films with superior fluorine plasma resistance for semiconductor equipment applications

Number of pages: 42 Posted: 27 Dec 2025

Seungri Kim, Hae-Seong Jang, Changui Ahn, Yoon-Suk Oh, In-Hwan Lee and Sung-Min Lee

Korea University, Korea University, affiliation not provided to SSRN, Korea University, Chonbuk National University and affiliation not provided to SSRN

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