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Sun Woo Lee
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SCHOLARLY PAPERS
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Scholarly Papers (1)
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1.
Effect of W nucleation process on the adhesion of W/TiN/SiO2 structures for BEOL interconnects
Number of pages: 26
Posted: 31 Dec 2025
Sun Woo Lee,
Dong Jun Kim
,
Jinho Jeon
and
TaekSoo Kim
affiliation not provided to SSRN
,
affiliation not provided to SSRN
, Gachon University and Korea Advanced Institute of Science and Technology (KAIST) - Department of Mechanical Engineering
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Abstract:
CVD-W, Adhesion, BEOL, diborane, silane, crack path shift
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