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Jiaxuan Liu

Zhejiang University

  • Zhejiang University

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Scholarly Papers (1)

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High-performance DMD maskless lithography system via position and velocity correction and overall pattern uniformity optimization

Number of pages: 10 Posted: 09 Jan 2026
Jiaxuan Liu, Tianhang Chen, Jisen Wen, Qianyi Yuan, Xiao Lin, Yuankun Shi, Wenqi Zhuang, Mengdi Luo, Chenyi Su and Cuifang Kuang
Zhejiang University, Zhejiang University, Zhejiang University, Zhejiang University, Zhejiang University, Zhejiang University, Zhejiang University, Zhejiang University, Zhejiang University and Zhejiang University
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Abstract:

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Maskless lithography, Rolling Scan, Motion compensation, Illumination Homogenization, Microfabrication