Study of Dielectric and Structural Properties of Polyimide-Nanocomposite Films.

5 Pages Posted: 25 Mar 2019

See all articles by Deepali Shrivastava

Deepali Shrivastava

University of Mumbai - Pillai College of Engineering

Prem Goyal

University of Mumbai - Pillai College of Engineering

S. K. Deshpande

UGC-DAE Consortium for Scientific Research, Mumbai Centre, BARC

Date Written: March 23, 2019

Abstract

Efforts are being made, world over, to develop low dielectric (say κ < 2.0) materials for microelectronic applications. Polyimides (PIs) are among the most promising candidates for above applications as, in addition to low κ, they are thermally stable and have good adhesion to metal which is a requirement for fabricating microelectronics devices. Pure PI films, however, cannot be used as PI has dielectric constant of about 3.4. Thus, we have synthesized nanocomposite PI films having nano-pores or silica nanoparticles embedded in them as it is known that porosity leads to lowering of dielectric constant. This involved chemical modification of PI at precursor’s stage using Siloxanes modifiers. The films have been characterized for their thermal stability, structure and dielectric behaviour using techniques such as TGA, FTIR, AFM and impedance analyzer. This paper reports the details of synthesis and characterization of above films.

Keywords: Polyimide films, Siloxanes Structure, Dielectric constant, FTIR, AFM

Suggested Citation

Shrivastava, Deepali and Goyal, Prem and Deshpande, S. K., Study of Dielectric and Structural Properties of Polyimide-Nanocomposite Films. (March 23, 2019). Proceedings 2019: Conference on Technologies for Future Cities (CTFC), Available at SSRN: https://ssrn.com/abstract=3358789 or http://dx.doi.org/10.2139/ssrn.3358789

Deepali Shrivastava (Contact Author)

University of Mumbai - Pillai College of Engineering ( email )

Dr. K. M.Vasudevan Pillai Campus
Plot 10, Sector 16, New Panvel
Navi Mumbai, 410206
India

Prem Goyal

University of Mumbai - Pillai College of Engineering ( email )

Dr. K. M.Vasudevan Pillai Campus
Plot 10, Sector 16, New Panvel
Navi Mumbai, 410206
India

S. K. Deshpande

UGC-DAE Consortium for Scientific Research, Mumbai Centre, BARC ( email )

Mumbai
India

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