An Engineering Approach for Modeling and Design of a Diaphragm Based Comb Drive Capacitive Pressure Sensor

4 Pages Posted: 9 Jan 2020

See all articles by Maibam Sanju Meetei

Maibam Sanju Meetei

Rajiv Gandhi University

Aheibam Dinamani Singh

North Eastern Regional Institute of Science and Technology (NERIST)

Swanirbhar Majumder

Tripura University - Departmentof Information Technology

Date Written: January 9, 2020

Abstract

The Microelectromechanical (MEMS) diaphragm based comb drive capacitive pressure sensor has two stages, Mechanical (Diaphragm) and Capacitive (Comb Drive). The diaphragm displaces in response to apply pressure and the displacement moves the movable comb structure. The two most common architectures of comb drive are single side comb structure and double fold comb structure. In this paper, an impressive technique for designing and modelling of single side comb structure capacitive pressure sensor is being presented. A mathematical model of the sensor is derived and the model simulates the designed structure with the COMSOL Multiphysics Simulator. The Mechanical Sensitivity, Electrostatic sensitivity and Overall Sensitivity are studied for the designed structure. A comparative study of the mathematic analytical values and simulated output values are examined and are found very much closed to each other. The various parameter like Young’s Modulus, Poisson’s Ratio, Dimensions and Structure of the pressure sensor, number of comb fingers and dimension of the comb finger affecting the sensitivity is widely discussed. Keywords: coupler, fringing effect, electrostatic sensitivity, mechanical sensitivity.

Keywords: coupler, fringing effect, electrostatic sensitivity, mechanical sensitivity

Suggested Citation

Sanju Meetei, Maibam and Dinamani Singh, Aheibam and Majumder, Swanirbhar, An Engineering Approach for Modeling and Design of a Diaphragm Based Comb Drive Capacitive Pressure Sensor (January 9, 2020). Proceedings of the 5th International Conference on Computers & Management Skills (ICCM 2019) | North Eastern Regional Institute of Science & Technology (NERIST), Nirjuli, Arunachal Pradesh, India, Available at SSRN: https://ssrn.com/abstract=3516732 or http://dx.doi.org/10.2139/ssrn.3516732

Maibam Sanju Meetei (Contact Author)

Rajiv Gandhi University ( email )

Aheibam Dinamani Singh

North Eastern Regional Institute of Science and Technology (NERIST) ( email )

NH 52A
Itanagar, Arunachal Pradesh 791109
India

Swanirbhar Majumder

Tripura University - Departmentof Information Technology ( email )

India

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