A Novel Design and Modeling of Beam Bridge Structure Piezoelectric Pressure Sensor Base on ZnO

Abstract

The main objective of this study is to design a ZnO base beam bridge MEMS piezoelectric pressure sensor. A theoretical mathematical modeling of the design is derived for the structure. Factor effecting the output or efficiency is studied base on mechanical and electrostatics step by steps. A simulation is conducted on Comsol Multiphysics Simulator for the design for validating the theoretical modeling and a comparative study are made between the analytical and simulated result. This study will help to find the optimum design structure for piezoelectric pressure sensor base on bridge beam structure.

Keywords: Young modulus, Poisson Ratio, deflection,stress, voltage constant