Improvement in Ammonia Sensing Characteristics of Titanium Dioxide(TiO2) Thin Film by Palladium(Pd) Doping.

Abstract

A lot of reports are already available about how adding palladium to titanium dioxide improves its gas sensing abilities towards formaldehyde, ethanol, LPG, acetone and methane gases. However, not much has been reported about ammonia gas sensing using palladium doped titanium dioxide thin film. In this work, TiO2 and Pd doped TiO2 thin films have been deposited using DC magnetron sputtering. Thereafter, ammonia gas sensing characteristics of these films were investigated. In this paper, it has been shown that there results an improvement in the ammonia gas sensing characteristics of TiO2 thin film when it is doped with palladium.

Keywords: Metal Oxide Semiconductors; Adsorbs; Donor Vacancies; Receptor Function; Transducer Function; Spillover; DC Magnetron System; Sputtering; Partial Pressure; SEM; AFM; XRD; Sensitivity factor(SF); Optimum Operating Temperature