Controlling Thermal Diffusivity, Residual Stress and Texture in W/Cu Nano-Multilayers by Magnetron Chamber Pressure Variation

12 Pages Posted: 12 Oct 2020

See all articles by León Romano Brandt

León Romano Brandt

University of Oxford - Multi-Beam Laboratory for Engineering Microscopy

Abdallah Reza

University of Oxford - Department of Engineering Science

Enrico Salvati

University of Oxford - Multi-Beam Laboratory for Engineering Microscopy

Eric Le Bourhis

Université de Poitiers - Institut P’, UPR 3346, CNRS

Felix Hofmann

University of Oxford - Department of Engineering Science

Alexander M. Korsunsky

University of Oxford - Multi-Beam Laboratory for Engineering Microscopy

Date Written: 2020

Abstract

The effect of magnetron deposition pressure during manufacture of W/Cu nano-laminates on their thermal diffusivity, residual stress depth profiles and texture was analysed. A strong correlation between these properties and the Ar working pressure was confirmed experimentally via a combination of Transient Grating Spectroscopy, Focused Ion Beam ring drilling, and cross-sectional high resolution SEM and EDX characterisation. The underlying mechanisms controlling thermal diffusivity and residual stress can be related to the defect evolution during sputter deposition, which is largely controlled by the interaction of the working gas and the sputtered metal atoms.

Keywords: Thermal diffusivity, Residual Stress, Nano multilayer, Magnetron sputter deposition, Transient Grating Spectroscopy

Suggested Citation

Romano Brandt, León and Reza, Abdallah and Salvati, Enrico and Le Bourhis, Eric and Hofmann, Felix and Korsunsky, Alexander M., Controlling Thermal Diffusivity, Residual Stress and Texture in W/Cu Nano-Multilayers by Magnetron Chamber Pressure Variation (2020). Available at SSRN: https://ssrn.com/abstract=3708723 or http://dx.doi.org/10.2139/ssrn.3708723

León Romano Brandt (Contact Author)

University of Oxford - Multi-Beam Laboratory for Engineering Microscopy ( email )

United Kingdom

Abdallah Reza

University of Oxford - Department of Engineering Science ( email )

Mansfield Road
Oxford, Oxfordshire OX1 4AU
United Kingdom

Enrico Salvati

University of Oxford - Multi-Beam Laboratory for Engineering Microscopy ( email )

United Kingdom

Eric Le Bourhis

Université de Poitiers - Institut P’, UPR 3346, CNRS ( email )

Felix Hofmann

University of Oxford - Department of Engineering Science ( email )

Mansfield Road
Oxford, Oxfordshire OX1 4AU
United Kingdom

Alexander M. Korsunsky

University of Oxford - Multi-Beam Laboratory for Engineering Microscopy ( email )

United Kingdom

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