The effect of obtaining conditions on the structure and composition of Cu-MoS2 coatings upon magnetron sputtering of composite targets

9 Pages Posted: 9 Apr 2021

Date Written: April 6, 2021

Abstract

The surface morphology and phase composition of the coatings obtained by magnetron sputtering of Cu-MoS2 composite targets have been studied by X-ray diffraction, scanning electron microscopy and X-ray spectral microanalysis. X-ray diffraction studies of coatings show presence of two crystalline phases, namely Cu with face-centered cubic lattice and CuMo6S8 with a rhombohedral lattice. Studies of the surface morphology in Cu-CuMo6S8 coatings revealed two types of structures. One of the structures is realized in the form of globular formations, while the second is similar to the structure that had single-component Cu coating. X-ray spectral microanalysis showed that globular formations have higher Mo and S contents in comparison with other type of surface structure. The ratio between these elements is close to that in CuMo6S8. However, the Cu content is many times higher than the calculated amount for this compound. This suggests that globular formations are heterostructural where only one of the phases is CuMo6S8. Other possible phases in globular formations should be based on copper. The total area of globular formations in the coating increases with an increase in the proportion of MoS2 in the composition of the Cu-MoS2 sputtered composite target and strongly depends on the substrate potential.

Keywords: mos2, magnetron, vacuum, coating

JEL Classification: l61,l62,l63,l91,l92,l93,l94,l95

Suggested Citation

Sagalovych, Alex and Dudnik, Stanislav and Sagalovych, Vladislav and Dzuiba, Artem and Popov, Viktor, The effect of obtaining conditions on the structure and composition of Cu-MoS2 coatings upon magnetron sputtering of composite targets (April 6, 2021). Available at SSRN: https://ssrn.com/abstract=3821056 or http://dx.doi.org/10.2139/ssrn.3821056

Alex Sagalovych (Contact Author)

JSC «FED» ( email )

Sumska str., 132
Kharkiv, 61023
Ukraine

Stanislav Dudnik

JSC «FED» ( email )

Sumska str., 132
Kharkiv, 61023
Ukraine

Vladislav Sagalovych

NTC «Nanotechnologie» ( email )

Myru blvd., 3
Kharkiv, 61108
Ukraine

Artem Dzuiba

JSC «FED» ( email )

Sumska str., 132
Kharkiv, 61023
Ukraine

Viktor Popov

JSC "FED" ( email )

Sumska str., 132
Kharkiv, 61023
Ukraine

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