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Low Temperature Deposition of Bifeo3 Films on Ti Foils for Piezoelectric Applications

14 Pages Posted: 12 May 2021 Publication Status: Under Review

See all articles by Jing Yan

Jing Yan

Shandong University - Key Laboratory for Liquid-Solid Structure Evolution and Processing of Materials

Jun Ouyang

Qilu University of Technology - Institute of Advanced Energy Materials and Chemistry

Hongbo Cheng

Qilu University of Technology - Institute of Advanced Energy Materials and Chemistry

Peng Yan

Shandong University - Key Laboratory of High-efficiency and Clean Mechanical Manufacturing

Abstract

Predominantly (100)-oriented BiFeO 3 films with excellent ferroelectric and piezoelectric properties were successfully fabricated on Ti foils via RF-magnetron sputtering at 450 °C. Well-saturated P-E loops with a high remnant polarization ( P r ~72 μC/cm 2 ) and a large built-in field (~145 kV/cm) were observed in the BiFeO 3 films. A large transverse piezoelectric coefficient (| e 31,f | ~ 2.2± 0.2 C/m 2 ) was demonstrated in patterned BiFeO 3 -Ti cantilevers, together with a high piezoelectric figure of merit (~2.1 GPa), a large voltage response (~0.96 GV/cm) and a remarkable fatigue-resistance (~1.1% loss of | e 31,f | after 1.2×10 6 actuation cycles). These results indicate a great potential of BiFeO 3 films as piezo-active components in metal-based micro-electro-mechanical systems (MEMS).

Suggested Citation

Yan, Jing and Ouyang, Jun and Cheng, Hongbo and Yan, Peng, Low Temperature Deposition of Bifeo3 Films on Ti Foils for Piezoelectric Applications. Available at SSRN: https://ssrn.com/abstract=3844709 or http://dx.doi.org/10.2139/ssrn.3844709

Jing Yan (Contact Author)

Shandong University - Key Laboratory for Liquid-Solid Structure Evolution and Processing of Materials

Jinan
China

Jun Ouyang

Qilu University of Technology - Institute of Advanced Energy Materials and Chemistry ( email )

Jinan, 250353
China

Hongbo Cheng

Qilu University of Technology - Institute of Advanced Energy Materials and Chemistry

Jinan, 250353
China

Peng Yan

Shandong University - Key Laboratory of High-efficiency and Clean Mechanical Manufacturing

Jinan
China

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