Error Perturbation Analysis Method in Broad Band Monitoring of Optical Coating

Abstract

Broadband optical monitoring (BBOM) is the state-of-the-art technique in deposition of high-performance optical coatings. Using Taylor expansion and statistical methods, we propose an error perturbation analysis method to calculate the actual spectral performance of BBOM. The causes of random thickness errors and their numerical analysis method required for the analytical method are thoroughly explored. The spectrum of an ultra-steep dichroic filter simulated by the analytical method and computational manufacturing is compared, and the result shows this analytical method can predict the actual spectrum precisely and effectively. Such error perturbation analysis method will be used in the coating deposition process with BBOM to improve the production yield.

Keywords: Optical coating, Broad band monitoring, Prediction of coating deposition, Error analytical method, Computational manufacturing