Nanoindentation-Induced Plastic-Deformation Behavior of Tetrahedral Amorphous Carbon Film with Different Cr Contents

Abstract

The nanoindentation-induced deformation behavior of the Cr-doped diamond-like carbon (DLC) films was clarified with Cr concentration varying from 0 to 16.5 at.% by experiment and molecular dynamics simulation. The Cr-DLC films were fabricated by a direct cathode vacuum arc technique and Cr dopants existed in the form of stripes owing to the deposition features. Results showed the addition of Cr facilitated the transformation of sp3-C bonds to sp2-C bonds, resulting in a decrease of the hardness and elastic modulus. Especially, the sp2 nano-crystallites with the lamellar structure were found in the Cr (16.5 at.%)-DLC film. During nanoindentation, the ring-like cracking on the surface and lateral crack at the interface are exhibited in the Cr-free DLC film, while the introduction of Cr makes the DLC film alleviate the cracking trend. According to the atomic-scale analysis, Cr can significantly improve the plasticity of the DLC film because the Cr-rich cluster with a high free volume can facilitate the shear transformation zones percolation and the shear bands (SBs) nucleation by collective coordinated vortex-like movements of atoms. The Cr-free DLC film can hardly accommodate high plastic strain with very few fine SBs and blockage of the SBs.

Keywords: Diamond-like carbon film, direct cathode vacuum arc, Plasticity, Nanoindentation, shear bands, Molecular dynamics simulation